Observation of sputtered Si surface irradiated with metal cluster complex ions

Yoshikazu Teranishi^*, Kouji Kondou, Yukio Fujiwara, Hidehiko Nonaka, Misuhiro Tomita, Kazuhiro Yamamoto, Toshiyuki Fujimoto, Shingo Ichimura

^*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review