On the Crystal Structural Control of Sputtered TiO2 Thin Films

Junjun Jia, Haruka Yamamoto, Toshihiro Okajima, Yuzo Shigesato

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In this study, we focused on the origin on the selective deposition of rutile and anatase TiO2 thin films during the sputtering process. The observation on microstructural evolution of the TiO2 films by transmission electron microscopy revealed the coexistence of rutile and anatase TiO2 phases in the initial stage under the preferential growth conditions for the anatase TiO2; the observations further revealed that the anatase phase gradually dominated the crystal structure with increasing film thickness. These results suggest that the bombardment during the sputtering deposition did not obviously affect the TiO2 crystal structure, and this was also confirmed by off-axis magnetron sputtering experiments. We also investigated the mechanism of the effect of Sn impurity doping on the crystal structure using first-principles calculations. It is found that the formation energy of Sn-doped rutile TiO2 is lower than that of Sn-doped anatase TiO2; this suggests that the Sn-doped TiO2 favours the rutile phase. These results offer a guideline for the utilization of selective deposition of rutile and anatase TiO2 thin films in various industrial applications.

Original languageEnglish
Article number324
JournalNanoscale Research Letters
Volume11
Issue number1
DOIs
Publication statusPublished - 2016 Dec 1
Externally publishedYes

Fingerprint

anatase
Titanium dioxide
rutile
Thin films
Crystals
thin films
crystals
Crystal structure
crystal structure
Sputtering
sputtering
Microstructural evolution
energy of formation
Magnetron sputtering
Industrial applications
Film thickness
titanium dioxide
bombardment
magnetron sputtering
film thickness

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

On the Crystal Structural Control of Sputtered TiO2 Thin Films. / Jia, Junjun; Yamamoto, Haruka; Okajima, Toshihiro; Shigesato, Yuzo.

In: Nanoscale Research Letters, Vol. 11, No. 1, 324, 01.12.2016.

Research output: Contribution to journalArticle

Jia, Junjun ; Yamamoto, Haruka ; Okajima, Toshihiro ; Shigesato, Yuzo. / On the Crystal Structural Control of Sputtered TiO2 Thin Films. In: Nanoscale Research Letters. 2016 ; Vol. 11, No. 1.
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