On the scaling limit of the Si-IGBTs with very narrow mesa structure

Katsumi Eikyu, Atsushi Sakai, Hitoshi Matsuura, Yoshito Nakazawa, Yutaka Akiyama, Yasuo Yamaguchi, Masahide Inuishi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

38 Citations (Scopus)

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Engineering & Materials Science