On-wafer-packaging of crystal quartz based devises using low-temperature anodic bonding

Y. Zimin, T. Ueda

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Fingerprint Dive into the research topics of 'On-wafer-packaging of crystal quartz based devises using low-temperature anodic bonding'. Together they form a unique fingerprint.

    Engineering & Materials Science