One-step sub-10 μm patterning of carbon-nanotube thin films for transparent conductor applications

Norihiro Fukaya, Dong Young Kim, Shigeru Kishimoto, Suguru Noda, Yutaka Ohno*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

72 Citations (Scopus)


We propose a technique for one-step micropatterning of as-grown carbon-nanotube films on a plastic substrate with sub-10 μm resolution on the basis of the dry transfer process. By utilizing this technique, we demonstrated the novel high-performance flexible carbon-nanotube transparent conductive film with a microgrid structure, which enabled improvement of the performance over the trade-off between the sheet resistance and transmittance of a conventional uniform carbon-nanotube film. The sheet resistance was reduced by 46% at its maximum by adding the microgrid, leading to a value of 53 ω/sq at a transmittance of 80%. We also demonstrated easy fabrication of multitouch projected capacitive sensors with 12 × 12 electrodes. The technique is quite promising for energy-saving production of transparent conductor devices with 100% material utilization.

Original languageEnglish
Pages (from-to)3285-3293
Number of pages9
JournalACS Nano
Issue number4
Publication statusPublished - 2014 Apr 22


  • carbon nanotube
  • flexible
  • micropatterning
  • touch sensor
  • transparent conductive film

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)


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