Operation of three-dimensional MEMS mirror by single superposed driving signal

Toshiya Nagasawa, Yohei Oguchi, Eiji Iwase

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x- and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x- and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10°/V, 0.10°/V, and 70nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal.

Original languageEnglish
Article number06GN12
JournalJapanese journal of applied physics
Volume56
Issue number6
DOIs
Publication statusPublished - 2017 Jun

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Operation of three-dimensional MEMS mirror by single superposed driving signal'. Together they form a unique fingerprint.

Cite this