Operation of three-dimensional MEMS mirror by single superposed driving signal

Toshiya Nagasawa, Yohei Oguchi, Eiji Iwase

    Research output: Contribution to journalArticle

    3 Citations (Scopus)

    Abstract

    We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x- and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x- and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10°/V, 0.10°/V, and 70nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal.

    Original languageEnglish
    Article number06GN12
    JournalJapanese Journal of Applied Physics
    Volume56
    Issue number6
    DOIs
    Publication statusPublished - 2017 Jun 1

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    microelectromechanical systems
    MEMS
    Natural frequencies
    Mirrors
    mirrors
    Lorentz force
    resonant frequencies
    Electric potential
    electric potential

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

    Cite this

    Operation of three-dimensional MEMS mirror by single superposed driving signal. / Nagasawa, Toshiya; Oguchi, Yohei; Iwase, Eiji.

    In: Japanese Journal of Applied Physics, Vol. 56, No. 6, 06GN12, 01.06.2017.

    Research output: Contribution to journalArticle

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