We demonstrate actuation of a silicon photonic crystal membrane with a repulsive optical gradient force. The extent of the static actuation is extracted by examining the optical bistability as a combination of the optomechanical, thermo-optic, and photo-thermo-mechanical effects using coupled-mode theory. Device behavior is dominated by a repulsive optical force which results in displacements of ≈ 1 nm/mW. By employing an extended guided resonance which effectively eliminates multi-photon thermal and electronic nonlinearities, our silicon-based device provides a simple, non-intrusive solution to extending the actuation range of micro-electromechanical devices.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)