Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips

T. Shimizu, M. Nakada, H. Tsuda, J. Akedo, K. Nishi, K. Ohashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device's optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.

Original languageEnglish
Title of host publication2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages831-833
Number of pages3
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan
Duration: 2007 May 272007 May 31

Publication series

NameIEEE International Symposium on Applications of Ferroelectrics

Other

Other2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
CountryJapan
CityNara-city
Period07/5/2707/5/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Shimizu, T., Nakada, M., Tsuda, H., Akedo, J., Nishi, K., & Ohashi, K. (2007). Optical characteristics of a PZT waveguide fabricated using aerosol deposition for optical modulators on LSI chips. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 831-833). [4393418] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393418