Optical study of the accumulated charge in the amorphous InGaZnO 4 thin-film transistor

Akira Kato, Yoshiaki Uesu, Takuro Katsufuji

    Research output: Contribution to journalArticle

    Abstract

    Thin-film transistors (TFTs) with amorphous InGaZnO 4 as a channel layer are known to exhibit high field-effect mobility. We studied the characteristic of the accumulated carriers in this TFT by optical spectroscopy and observed Drude absorption and oscillation in the transmittance spectrum of the channel region appearing with an applied gate voltage. The scattering rate of the carriers in the accumulation layers estimated from the optical spectrum is ℏ/τAL = 0: 19 eV, and this small value is the origin of the high mobility of the TFT with amorphous InGaZnO 4.

    Original languageEnglish
    Article number093706
    JournalJournal of the Physical Society of Japan
    Volume78
    Issue number9
    DOIs
    Publication statusPublished - 2009 Sep

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    Keywords

    • Charge accumulation
    • Optical spectroscopy
    • Thin-film transistor

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

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