Abstract
We report an optical waveguide sensor using ring resonator. A refractive index sensor using resonator with vertical light input will be described. A grating coupler is used to couple the light beam to waveguide and output the light beam. The device has diameter of 40 μm with 500 nm wide waveguide, and fabricated in silicon on insulator (SOI). Experiments show that it has 313 nm/RIU sensitivity and detection limit of 1.5×10-3 RIU for changes in the refractive index of the sample.
| Original language | English |
|---|---|
| Title of host publication | Technical Digest of the 18th Microoptics Conference, MOC 2013 |
| Publication status | Published - 2013 |
| Event | 2013 18th Microoptics Conference, MOC 2013 - Tokyo Duration: 2013 Oct 27 → 2013 Oct 30 |
Other
| Other | 2013 18th Microoptics Conference, MOC 2013 |
|---|---|
| City | Tokyo |
| Period | 13/10/27 → 13/10/30 |
Fingerprint
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Fujiwara, N., Okayama, H., Irikawa, H., Ooka, T., Tsutsui, M., & Nakajima, H. (2013). Optical waveguide resonator for one-port refractive index sensing. In Technical Digest of the 18th Microoptics Conference, MOC 2013 [6715132]