Optical waveguide resonator for one-port refractive index sensing

N. Fujiwara, H. Okayama, H. Irikawa, T. Ooka, M. Tsutsui, H. Nakajima

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We report an optical waveguide sensor using ring resonator. A refractive index sensor using resonator with vertical light input will be described. A grating coupler is used to couple the light beam to waveguide and output the light beam. The device has diameter of 40 μm with 500 nm wide waveguide, and fabricated in silicon on insulator (SOI). Experiments show that it has 313 nm/RIU sensitivity and detection limit of 1.5×10-3 RIU for changes in the refractive index of the sample.

    Original languageEnglish
    Title of host publicationTechnical Digest of the 18th Microoptics Conference, MOC 2013
    Publication statusPublished - 2013
    Event2013 18th Microoptics Conference, MOC 2013 - Tokyo
    Duration: 2013 Oct 272013 Oct 30

    Other

    Other2013 18th Microoptics Conference, MOC 2013
    CityTokyo
    Period13/10/2713/10/30

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials

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  • Cite this

    Fujiwara, N., Okayama, H., Irikawa, H., Ooka, T., Tsutsui, M., & Nakajima, H. (2013). Optical waveguide resonator for one-port refractive index sensing. In Technical Digest of the 18th Microoptics Conference, MOC 2013 [6715132]