Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved.

Original languageEnglish
Pages (from-to)275-281
Number of pages7
JournalIEEJ Transactions on Sensors and Micromachines
Volume132
Issue number9
DOIs
Publication statusPublished - 2012

Keywords

  • Electrode
  • Finite element method
  • Optimization

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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