Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

Siim Heinsalu; Yuichi Matsushima; Hiroshi Ishikawa; Katsuyuki Utaka

doi:10.1109/SENSORS47087.2021.9639246

Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

Siim Heinsalu, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

Original language	English
Title of host publication	2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728195018
DOIs	https://doi.org/10.1109/SENSORS47087.2021.9639246
Publication status	Published - 2021
Event	20th IEEE Sensors, SENSORS 2021 - Virtual, Online, Australia Duration: 2021 Oct 31 → 2021 Nov 4

Publication series

Name	Proceedings of IEEE Sensors
Volume	2021-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	20th IEEE Sensors, SENSORS 2021
Country/Territory	Australia
City	Virtual, Online
Period	21/10/31 → 21/11/4

Keywords

Bragg gratings
optical sensors
optimization for high sensitivity

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSORS47087.2021.9639246

Cite this

Heinsalu, S., Matsushima, Y., Ishikawa, H., & Utaka, K. (2021). Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity. In 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings (Proceedings of IEEE Sensors; Vol. 2021-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS47087.2021.9639246

Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity. / Heinsalu, Siim; Matsushima, Yuichi; Ishikawa, Hiroshi et al.

2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (Proceedings of IEEE Sensors; Vol. 2021-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Heinsalu, S, Matsushima, Y, Ishikawa, H & Utaka, K 2021, Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity. in 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Proceedings of IEEE Sensors, vol. 2021-October, Institute of Electrical and Electronics Engineers Inc., 20th IEEE Sensors, SENSORS 2021, Virtual, Online, Australia, 21/10/31. https://doi.org/10.1109/SENSORS47087.2021.9639246

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title = "Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity",

abstract = "In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.",

keywords = "Bragg gratings, optical sensors, optimization for high sensitivity",

author = "Siim Heinsalu and Yuichi Matsushima and Hiroshi Ishikawa and Katsuyuki Utaka",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 20th IEEE Sensors, SENSORS 2021 ; Conference date: 31-10-2021 Through 04-11-2021",

year = "2021",

doi = "10.1109/SENSORS47087.2021.9639246",

language = "English",

series = "Proceedings of IEEE Sensors",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

AU - Heinsalu, Siim

AU - Matsushima, Yuichi

AU - Ishikawa, Hiroshi

AU - Utaka, Katsuyuki

PY - 2021

Y1 - 2021

N2 - In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

AB - In this paper we show the optimization procedure and experimental results for suspended ladder Bragg grating on silicon on insulator platform for both wavelength sensitivity and amplitude sensitivity. As results, by optimizing the structures for high wavelength sensitivity 1100 nm/RIU by simulation and 865 nm/RIU by experiment with sensor lengths of about 10 m were obtained. On the other hand, for high amplitude sensitivity, 51.3 dB with medium 0.01 RIU change by simulation and 24.5 dB with medium 0.004 RIU change by experiment with sensor lengths of 32.2 m and 38 m respectively.

KW - Bragg gratings

KW - optical sensors

KW - optimization for high sensitivity

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T3 - Proceedings of IEEE Sensors

BT - 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th IEEE Sensors, SENSORS 2021

Y2 - 31 October 2021 through 4 November 2021

ER -

Optimization of suspended ladder BG silicon sensors for high wavelength or amplitude sensitivity

Abstract

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Keywords

ASJC Scopus subject areas

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