Optimization of the tip of microwave AFM probe

Yang Ju, Motohiro Hamada, Atsushi Hosoi, Akifumi Fujimoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied. The fabricated probe had a tip of 8 μ m high and curvature radius approximately 30 nm. The dimensions of the cantilever are 250x30x15 μm. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam (FIB) fabrication. To improve the resolution of AFM measurement, only the metal film was removed at the end of the probe tip. AFM topography of a grating sample was measured by the fabricated probe. As a result, it was found that the resolution of AFM measurement and the ratio of signal to noise were enhanced.

Original languageEnglish
Title of host publicationProceedings of the ASME InterPack Conference 2009, IPACK2009
Pages485-490
Number of pages6
Volume1
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event2009 ASME InterPack Conference, IPACK2009 - San Francisco, CA
Duration: 2009 Jul 192009 Jul 23

Other

Other2009 ASME InterPack Conference, IPACK2009
CitySan Francisco, CA
Period09/7/1909/7/23

Fingerprint

Microscopes
Microwaves
Waveguides
Fabrication
Focused ion beams
Topography
Metals

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Ju, Y., Hamada, M., Hosoi, A., & Fujimoto, A. (2010). Optimization of the tip of microwave AFM probe. In Proceedings of the ASME InterPack Conference 2009, IPACK2009 (Vol. 1, pp. 485-490) https://doi.org/10.1115/InterPACK2009-89252

Optimization of the tip of microwave AFM probe. / Ju, Yang; Hamada, Motohiro; Hosoi, Atsushi; Fujimoto, Akifumi.

Proceedings of the ASME InterPack Conference 2009, IPACK2009. Vol. 1 2010. p. 485-490.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ju, Y, Hamada, M, Hosoi, A & Fujimoto, A 2010, Optimization of the tip of microwave AFM probe. in Proceedings of the ASME InterPack Conference 2009, IPACK2009. vol. 1, pp. 485-490, 2009 ASME InterPack Conference, IPACK2009, San Francisco, CA, 09/7/19. https://doi.org/10.1115/InterPACK2009-89252
Ju Y, Hamada M, Hosoi A, Fujimoto A. Optimization of the tip of microwave AFM probe. In Proceedings of the ASME InterPack Conference 2009, IPACK2009. Vol. 1. 2010. p. 485-490 https://doi.org/10.1115/InterPACK2009-89252
Ju, Yang ; Hamada, Motohiro ; Hosoi, Atsushi ; Fujimoto, Akifumi. / Optimization of the tip of microwave AFM probe. Proceedings of the ASME InterPack Conference 2009, IPACK2009. Vol. 1 2010. pp. 485-490
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