Optimum design of gate/N- overlapped LDD transistor

Masahide Inuishi, K. Mitsui, S. Komori, M. Shimizu, H. Oda, J. Mitsuhashi, K. Tsukamoto

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The authors present the optimum design and fabrication of the overlapped LDD (lightly doped drain) NMOS transistor. They use simulation to clarify the internal state of the overlapped LDD transistor under operation, evaluate the improved electrical characteristics of devices fabricated by rotational oblique N- implantation, and show that the optimum design overlapped LDD can surpass the conventional LDD in device characteristics and circuit speed. They also show that oblique implantation is a promising method for forming the gate/N- overlapped structures due to the simple control of the N- region in terms of implantation angle and energy.

Original languageEnglish
Pages (from-to)33-34
Number of pages2
JournalUnknown Journal
Publication statusPublished - 1989
Externally publishedYes

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implantation
Transistors
transistors
Fabrication
Networks (circuits)
fabrication
Optimum design
simulation
energy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Inuishi, M., Mitsui, K., Komori, S., Shimizu, M., Oda, H., Mitsuhashi, J., & Tsukamoto, K. (1989). Optimum design of gate/N- overlapped LDD transistor. Unknown Journal, 33-34.

Optimum design of gate/N- overlapped LDD transistor. / Inuishi, Masahide; Mitsui, K.; Komori, S.; Shimizu, M.; Oda, H.; Mitsuhashi, J.; Tsukamoto, K.

In: Unknown Journal, 1989, p. 33-34.

Research output: Contribution to journalArticle

Inuishi, M, Mitsui, K, Komori, S, Shimizu, M, Oda, H, Mitsuhashi, J & Tsukamoto, K 1989, 'Optimum design of gate/N- overlapped LDD transistor', Unknown Journal, pp. 33-34.
Inuishi M, Mitsui K, Komori S, Shimizu M, Oda H, Mitsuhashi J et al. Optimum design of gate/N- overlapped LDD transistor. Unknown Journal. 1989;33-34.
Inuishi, Masahide ; Mitsui, K. ; Komori, S. ; Shimizu, M. ; Oda, H. ; Mitsuhashi, J. ; Tsukamoto, K. / Optimum design of gate/N- overlapped LDD transistor. In: Unknown Journal. 1989 ; pp. 33-34.
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AU - Mitsuhashi, J.

AU - Tsukamoto, K.

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