Ordered structure in the thermal oxide layer on silicon substrates

T. Shimura*, E. Mishima, H. Watanabe, K. Yasutake, M. Umeno, K. Tatsumura, T. Watanabe, I. Ohdomari, K. Yamada, S. Kamiyama, Y. Akasaka, Y. Nara, K. Nakamura

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

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Engineering & Materials Science