TY - JOUR
T1 - Organosilane self-assembled monolayer-modified field effect transistors for on-chip ion and biomolecule sensing
AU - Niwa, Daisuke
AU - Omichi, Kaoru
AU - Motohashi, Norikazu
AU - Homma, Takayuki
AU - Osaka, Tetsuya
N1 - Funding Information:
The authors would like to thank financial support in part from Grants-in-Aid by Exploratory Research (Construction of Molecular Recognition–Semiconductor Multi Sensing Devices for Enzyme, Antibody, and DNA Assay), by COE Research (Establishment of Molecular Nano-Engineering by Utilizing Nanostructure Arrays and its Development into Micro-Systems), by Encouraging Development Strategic Research Centers Program, the Special Coordination Funds for Promoting Science and Technology (Establishment of Consolidated Research Institute for Advanced Science and Medical Care) and by 21st Century COE Program (Center for Practical Nano-Chemistry) from The Ministry of Education, Culture, Sports, Science and Technology, Japan. We thank Mr. K.S. Song, Dr. H. Umezawa and Prof. H. Kawarada for FET measurements and valuable discussions.
PY - 2005/7/22
Y1 - 2005/7/22
N2 - Field effect transistors (FETs) modified with various functional monolayers, such as organosilane monolayer, were formed on the identical substrate by precise control of the fabrication processes. The devices showed a typical transistor property with a good stability in aqueous solutions. The amino monolayer-modified FET acted as an ion sensitive FET with a good pH sensitivity of 58 mV/pH, and the perfluoro-alkyl monolayer-modified FET worked as a reference device. Moreover, the device with enzyme immobilized onto amino modified gate electrode enabled to detect trace concentration (10-9 to 10-6 M) of urea with a high sensitivity of 64 mV/decade. These monolayer-modified devices were expected to be applied as working and reference electrodes for on-chip ion and biosensing.
AB - Field effect transistors (FETs) modified with various functional monolayers, such as organosilane monolayer, were formed on the identical substrate by precise control of the fabrication processes. The devices showed a typical transistor property with a good stability in aqueous solutions. The amino monolayer-modified FET acted as an ion sensitive FET with a good pH sensitivity of 58 mV/pH, and the perfluoro-alkyl monolayer-modified FET worked as a reference device. Moreover, the device with enzyme immobilized onto amino modified gate electrode enabled to detect trace concentration (10-9 to 10-6 M) of urea with a high sensitivity of 64 mV/decade. These monolayer-modified devices were expected to be applied as working and reference electrodes for on-chip ion and biosensing.
KW - Field effect transistor
KW - Ion and biomolecule detection
KW - On-chip biosensing device
KW - Reference device
KW - Self-assembled monolayer
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U2 - 10.1016/j.snb.2004.11.055
DO - 10.1016/j.snb.2004.11.055
M3 - Article
AN - SCOPUS:19744363322
SN - 0925-4005
VL - 108
SP - 721
EP - 726
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
IS - 1-2 SPEC. ISS.
ER -