Oriented film growth of Ba1-xSrxTiO3 dielectrics on glass substrates using 2D nanosheet seed layer

Chulho Jung, Tsuyoshi Ohnishi, Minoru Osada, Kazunori Takada, Takayoshi Sasaki

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

An approach to fabricate Ba0.5Sr0.5TiO3 (BST) films with a preferred orientation on a glass substrate by pulsed laser deposition was developed. To ensure a preferred crystallographic orientation, we utilized a molecularly thin Ca2Nb3O 10perovskite nanosheet as a seed layer and successfully fabricated BST films with a nearly perfect (100)-axis orientation. The 100 nm films after annealing at 450 C in air showed a good dielectric performance (εr > 400), which was comparable to the εr value of epitaxially grown films with the same thickness. These results indicate that the nanosheet seed layer plays a crucial role in controlled film growth, realizing a nearly intrinsic performance of BST.

Original languageEnglish
Pages (from-to)4592-4596
Number of pages5
JournalACS Applied Materials and Interfaces
Volume5
Issue number11
DOIs
Publication statusPublished - 2013 Jun 12
Externally publishedYes

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Keywords

  • BaSrTiO
  • dielectrics
  • nanosheet
  • seed layer
  • thin-film growth

ASJC Scopus subject areas

  • Materials Science(all)

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