Oxidation on poly silicon at low temperature using UV light-excited ozone gas

Naoto Kameda, Tetsuya Nishiguchi, Yoshiki Morikawa, Mitsuru Kekura, Hidehiko Nonaka, Shingo Ichimura

Research output: Contribution to journalArticle

3 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy