Oxygen adsorption on hydrogen-preadsorbed Si(111)7 × 7 observed by second harmonic generation (SHG)

Ken Nakamura, Shingo Ichimura, Hazime Shimizu

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Abstract

Oxygen adsorption was in situ observed by second harmonic generation (SHG) on both clean and hydrogen-preadsorbed Si(111)7 × 7. The sticking probability of molecular oxygen was decreased by monohydride formation, although it was not a completely passivating surface. This is a different effect of monohydride from that on Si(111)1 × 1 for passivation. Hydrogen adsorption at room temperature leading to both monohydride and polyhydride formation showed two different stages of sticking probability, with increasing exposure for hydrogen preadsorption, sticking probability was furthermore decreased with oxygen adsorption. This is expected due to the formation of polyhydride species on Si(111)7 × 7 which was found to be necessary for passivating reconstructed Si(111)7 × 7.

Original languageEnglish
Pages (from-to)444-448
Number of pages5
JournalApplied Surface Science
Volume100-101
DOIs
Publication statusPublished - 1996 Jul 1
Externally publishedYes

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ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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