Oxygen ion implantation isolation planar process for AlGaN/GaN HEMTs

Jin Yu Shiu, Jui Chien Huang, Vincent Desmaris, Chia Ta Chang, Chung Yu Lu, Kazuhide Kumakura, Toshiki Makimoto, Herbert Zirath, Niklas Rorsman, Edward Yi Chang

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36 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds