Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges

Akira Kurokawa, Sonoko Tsukahara, Takichi Kobayashi, Hisao Hojyo, Shingo Ichimura

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.

Original languageEnglish
Pages (from-to)151-154
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Volume47
Issue number3
DOIs
Publication statusPublished - 2004 Jan 1
Externally publishedYes

Fingerprint

pressure gages
Pressure gages
Ozone
ozone
Gases
Quartz
viscosity
Viscosity
gases
Manometers
quartz
Viscosity measurement
manometers
Gas mixtures
Atmospheric pressure
impedance measurement
Capacitance
gas mixtures
Friction
atmospheric pressure

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges. / Kurokawa, Akira; Tsukahara, Sonoko; Kobayashi, Takichi; Hojyo, Hisao; Ichimura, Shingo.

In: Shinku/Journal of the Vacuum Society of Japan, Vol. 47, No. 3, 01.01.2004, p. 151-154.

Research output: Contribution to journalArticle

Kurokawa, Akira ; Tsukahara, Sonoko ; Kobayashi, Takichi ; Hojyo, Hisao ; Ichimura, Shingo. / Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges. In: Shinku/Journal of the Vacuum Society of Japan. 2004 ; Vol. 47, No. 3. pp. 151-154.
@article{81a94c91cbf94f61bc0c686fb25c733c,
title = "Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges",
abstract = "A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol{\%}, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol{\%}.",
author = "Akira Kurokawa and Sonoko Tsukahara and Takichi Kobayashi and Hisao Hojyo and Shingo Ichimura",
year = "2004",
month = "1",
day = "1",
doi = "10.3131/jvsj.47.151",
language = "English",
volume = "47",
pages = "151--154",
journal = "Journal of the Vacuum Society of Japan",
issn = "1882-2398",
publisher = "Vacuum Society of Japan",
number = "3",

}

TY - JOUR

T1 - Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges

AU - Kurokawa, Akira

AU - Tsukahara, Sonoko

AU - Kobayashi, Takichi

AU - Hojyo, Hisao

AU - Ichimura, Shingo

PY - 2004/1/1

Y1 - 2004/1/1

N2 - A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.

AB - A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.

UR - http://www.scopus.com/inward/record.url?scp=33750799815&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33750799815&partnerID=8YFLogxK

U2 - 10.3131/jvsj.47.151

DO - 10.3131/jvsj.47.151

M3 - Article

AN - SCOPUS:33750799815

VL - 47

SP - 151

EP - 154

JO - Journal of the Vacuum Society of Japan

JF - Journal of the Vacuum Society of Japan

SN - 1882-2398

IS - 3

ER -