Abstract
A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.
| Original language | English |
|---|---|
| Pages (from-to) | 151-154 |
| Number of pages | 4 |
| Journal | Shinku/Journal of the Vacuum Society of Japan |
| Volume | 47 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2004 Jan 1 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Cite this
Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges. / Kurokawa, Akira; Tsukahara, Sonoko; Kobayashi, Takichi; Hojyo, Hisao; Ichimura, Shingo.
In: Shinku/Journal of the Vacuum Society of Japan, Vol. 47, No. 3, 01.01.2004, p. 151-154.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges
AU - Kurokawa, Akira
AU - Tsukahara, Sonoko
AU - Kobayashi, Takichi
AU - Hojyo, Hisao
AU - Ichimura, Shingo
PY - 2004/1/1
Y1 - 2004/1/1
N2 - A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.
AB - A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O3/O2 gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.
UR - http://www.scopus.com/inward/record.url?scp=33750799815&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33750799815&partnerID=8YFLogxK
U2 - 10.3131/jvsj.47.151
DO - 10.3131/jvsj.47.151
M3 - Article
AN - SCOPUS:33750799815
VL - 47
SP - 151
EP - 154
JO - Journal of the Vacuum Society of Japan
JF - Journal of the Vacuum Society of Japan
SN - 1882-2398
IS - 3
ER -