Ozone concentration measurement of O2-O3 binary gas with two types of pressure gauges

Akira Kurokawa; Sonoko Tsukahara; Takichi Kobayashi; Hisao Hojyo; Shingo Ichimura

doi:10.3131/jvsj.47.151

Ozone concentration measurement of O₂-O₃ binary gas with two types of pressure gauges

Akira Kurokawa, Sonoko Tsukahara, Takichi Kobayashi, Hisao Hojyo, Shingo Ichimura

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Abstract

A concentration measuring method for a binary gas system, which was based on the viscosity measurement, was investigated. The method utilizes two types of pressure gauges, a capacitance manometer which depends just on pressure and a quartz friction pressure gauge which depends on both viscosity and pressure of a binary gas. The concentration of the binary gas can be estimated from the viscosity because the viscosity is given as a function of concentration of the binary gas. Firstly we applied the pressures-observing system to evaluate concentration of ozone in an O₃/O₂ gas mixture. The results indicated that this method allows a concentration measurement of ozone with an accuracy of Δ Cozone = 0.2 vol%, near atmospheric pressure. Secondly, we used an impedance measurement system of a quartz oscillator and we estimated the accuracy at A Cozone = 0.05 vol%.

Original language	English
Pages (from-to)	151-154
Number of pages	4
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	47
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.47.151
Publication status	Published - 2004 Jan 1

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ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Cite this

Kurokawa, A., Tsukahara, S., Kobayashi, T., Hojyo, H., & Ichimura, S. (2004). Ozone concentration measurement of O₂-O₃ binary gas with two types of pressure gauges. Shinku/Journal of the Vacuum Society of Japan, 47(3), 151-154. https://doi.org/10.3131/jvsj.47.151

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10.3131/jvsj.47.151