Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges

Akira Kurokawa, Kenji Odaka, Shingo Ichimura

Research output: Contribution to journalConference article

16 Citations (Scopus)

Abstract

We investigated a new method to measure the partial pressure of a binary gas system at near-atmospheric pressure conditions. The method utilizes two types of vacuum gauges, a capacitance manometer and a quartz friction pressure gauge. The partial pressure of the binary gas can be estimated by measuring the impedance change with a quartz friction pressure gauge, which depends on both viscosity and total pressure of a binary gas, and considering the total pressure change as measured by a capacitance manometer. We applied this method to measure the partial pressure of ozone in an ozone-oxygen gas mixture. The results suggested that the new method allows a partial-pressure measurement of ozone with an accuracy of Δp=0.2kPa, close to atmospheric pressure. The advantages of the new method include compact size, high safety standards when measuring highly reactive gases, and the allowance for in-line monitoring.

Original languageEnglish
Pages (from-to)301-304
Number of pages4
JournalVacuum
Volume73
Issue number2
DOIs
Publication statusPublished - 2004 Mar 19
Externally publishedYes
EventProceedings of the European Vacuum Congress Berlin 2003 - Berlin, Germany
Duration: 2003 Jun 232003 Jun 26

Fingerprint

pressure gages
Pressure gages
pressure measurement
Pressure measurement
Partial pressure
Atmospheric pressure
partial pressure
Ozone
atmospheric pressure
Gases
ozone
Manometers
manometers
Quartz
gases
Capacitance
friction
quartz
capacitance
Vacuum gages

Keywords

  • Atmospheric pressure
  • Binary gas
  • Capacitance manometer
  • Crystal friction gauge
  • Partial pressure
  • Viscosity

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges. / Kurokawa, Akira; Odaka, Kenji; Ichimura, Shingo.

In: Vacuum, Vol. 73, No. 2, 19.03.2004, p. 301-304.

Research output: Contribution to journalConference article

Kurokawa, Akira ; Odaka, Kenji ; Ichimura, Shingo. / Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges. In: Vacuum. 2004 ; Vol. 73, No. 2. pp. 301-304.
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