Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges

Akira Kurokawa, Kenji Odaka, Shingo Ichimura

Research output: Contribution to journalConference article

16 Citations (Scopus)

Abstract

We investigated a new method to measure the partial pressure of a binary gas system at near-atmospheric pressure conditions. The method utilizes two types of vacuum gauges, a capacitance manometer and a quartz friction pressure gauge. The partial pressure of the binary gas can be estimated by measuring the impedance change with a quartz friction pressure gauge, which depends on both viscosity and total pressure of a binary gas, and considering the total pressure change as measured by a capacitance manometer. We applied this method to measure the partial pressure of ozone in an ozone-oxygen gas mixture. The results suggested that the new method allows a partial-pressure measurement of ozone with an accuracy of Δp=0.2kPa, close to atmospheric pressure. The advantages of the new method include compact size, high safety standards when measuring highly reactive gases, and the allowance for in-line monitoring.

Original languageEnglish
Pages (from-to)301-304
Number of pages4
JournalVacuum
Volume73
Issue number2
DOIs
Publication statusPublished - 2004 Mar 19
Externally publishedYes
EventProceedings of the European Vacuum Congress Berlin 2003 - Berlin, Germany
Duration: 2003 Jun 232003 Jun 26

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Keywords

  • Atmospheric pressure
  • Binary gas
  • Capacitance manometer
  • Crystal friction gauge
  • Partial pressure
  • Viscosity

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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