Particle element and size simultaneous measurement using LIBS

Muneaki Wakamatsu*, Satoshi Ikezawa, Toshitsugu Ueda

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    15 Citations (Scopus)


    We have developed high-sensitivity in-situ measurement technology based on photons with visible to ultraviolet wavelength bands. This measurement technology builds on plasmatizing particles technology and a high-sensitivity measurement technology for measuring photons from the plasma. Thus, we have established a technology for measuring particle sizes and the constituent element content of particles with 10% accuracy.

    Original languageEnglish
    JournalIEEJ Transactions on Sensors and Micromachines
    Issue number9
    Publication statusPublished - 2007


    • Laser break down
    • LIBS
    • Particle measurement technology
    • Time measurement

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering


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