TY - GEN
T1 - PARTLY DISPOSABLE SWITCHING AND INJECTION MICROVALVES FOR MEDICAL APPLICATIONS
AU - Sato, Hironobu
AU - Shoji, Shuichi
AU - Kim, Eipin
AU - Miura, Keisuke
N1 - Funding Information:
Authors would like to thank Mr. E. Shinohara and Mr. T. Makino in BRC, Olympus Optical Co. LTD. for their supports. This work was partly supported by High Tech. Research Center Project (Research Laboratory for Energy, Environments, and Artificial Materials) and Micro Machine Center.
Publisher Copyright:
© 1999 American Society of Mechanical Engineers (ASME). All rights reserved.
PY - 1999
Y1 - 1999
N2 - Two types of one-inlet and four-outlets pneumatic microvalves for medical applications were fabricated and evaluated. Since the microvalves consist of a separable actuator part and a channel part, the channel part in which the sample liquid are introduced can be partly disposed. Both parts were fabricated using Si and polymer membrane. Two types of polymer membranes of silicone rubber and new cyclized perfluoro polymer (CPFP) were utilized in different types of microvalves for controlling high viscosity and low viscosity samples. In the case of the switching valve using silicone membrane, leakage was less than 0.01 μl/min (inlet pressure of ImH2O) and the maximum open/closed flow ratio is larger than 103 These microvalves are useful in parallel and multi sensing systems. To achieve the monitoring the pneumatic actuation, integration of piezoresistive pressure sensors on the actuator part was also carried out.
AB - Two types of one-inlet and four-outlets pneumatic microvalves for medical applications were fabricated and evaluated. Since the microvalves consist of a separable actuator part and a channel part, the channel part in which the sample liquid are introduced can be partly disposed. Both parts were fabricated using Si and polymer membrane. Two types of polymer membranes of silicone rubber and new cyclized perfluoro polymer (CPFP) were utilized in different types of microvalves for controlling high viscosity and low viscosity samples. In the case of the switching valve using silicone membrane, leakage was less than 0.01 μl/min (inlet pressure of ImH2O) and the maximum open/closed flow ratio is larger than 103 These microvalves are useful in parallel and multi sensing systems. To achieve the monitoring the pneumatic actuation, integration of piezoresistive pressure sensors on the actuator part was also carried out.
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U2 - 10.1115/IMECE1999-0274
DO - 10.1115/IMECE1999-0274
M3 - Conference contribution
AN - SCOPUS:85122702723
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 241
EP - 245
BT - Micro-Electro-Mechanical Systems (MEMS)
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999
Y2 - 14 November 1999 through 19 November 1999
ER -