PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow

Hironobu Sato, Seiki Ito, Kenji Tajima, Norimune Orimoto, Shuichi Shoji

    Research output: Contribution to journalArticle

    31 Citations (Scopus)

    Abstract

    This paper presents functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels can generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method for 3-D SU-8 molds using two-step inclined backside exposures and additional two-step top side exposures. The width and depth of the SU-8 microchannel are 100 μm. Slanted grooves of 50 μm in width and 30 μm in depth were patterned on the top and the side walls of the microchannel. Their orientation angle was 63.5° with the microchannel axis. It was demonstrated that the microchannel with slanted grooves on three walls achieved short pitch spiral flow compared to the microchannel with slanted grooves on one wall. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

    Original languageEnglish
    Pages (from-to)365-371
    Number of pages7
    JournalSensors and Actuators, A: Physical
    Volume119
    Issue number2
    DOIs
    Publication statusPublished - 2005 Apr 13

    Fingerprint

    microchannels
    Microchannels
    grooves
    Molds
    channel flow
    Channel flow
    Fabrication
    fabrication
    Liquids
    liquids

    Keywords

    • 3-D SU-8 molds
    • Backside exposure
    • Chaotic mixing
    • Efficient spiral flow

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Instrumentation

    Cite this

    PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow. / Sato, Hironobu; Ito, Seiki; Tajima, Kenji; Orimoto, Norimune; Shoji, Shuichi.

    In: Sensors and Actuators, A: Physical, Vol. 119, No. 2, 13.04.2005, p. 365-371.

    Research output: Contribution to journalArticle

    Sato, Hironobu ; Ito, Seiki ; Tajima, Kenji ; Orimoto, Norimune ; Shoji, Shuichi. / PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow. In: Sensors and Actuators, A: Physical. 2005 ; Vol. 119, No. 2. pp. 365-371.
    @article{51e2b858ad7a4c00909b9f1b5c77e39b,
    title = "PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow",
    abstract = "This paper presents functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels can generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method for 3-D SU-8 molds using two-step inclined backside exposures and additional two-step top side exposures. The width and depth of the SU-8 microchannel are 100 μm. Slanted grooves of 50 μm in width and 30 μm in depth were patterned on the top and the side walls of the microchannel. Their orientation angle was 63.5° with the microchannel axis. It was demonstrated that the microchannel with slanted grooves on three walls achieved short pitch spiral flow compared to the microchannel with slanted grooves on one wall. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.",
    keywords = "3-D SU-8 molds, Backside exposure, Chaotic mixing, Efficient spiral flow",
    author = "Hironobu Sato and Seiki Ito and Kenji Tajima and Norimune Orimoto and Shuichi Shoji",
    year = "2005",
    month = "4",
    day = "13",
    doi = "10.1016/j.sna.2004.08.033",
    language = "English",
    volume = "119",
    pages = "365--371",
    journal = "Sensors and Actuators, A: Physical",
    issn = "0924-4247",
    publisher = "Elsevier",
    number = "2",

    }

    TY - JOUR

    T1 - PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow

    AU - Sato, Hironobu

    AU - Ito, Seiki

    AU - Tajima, Kenji

    AU - Orimoto, Norimune

    AU - Shoji, Shuichi

    PY - 2005/4/13

    Y1 - 2005/4/13

    N2 - This paper presents functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels can generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method for 3-D SU-8 molds using two-step inclined backside exposures and additional two-step top side exposures. The width and depth of the SU-8 microchannel are 100 μm. Slanted grooves of 50 μm in width and 30 μm in depth were patterned on the top and the side walls of the microchannel. Their orientation angle was 63.5° with the microchannel axis. It was demonstrated that the microchannel with slanted grooves on three walls achieved short pitch spiral flow compared to the microchannel with slanted grooves on one wall. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

    AB - This paper presents functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels can generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method for 3-D SU-8 molds using two-step inclined backside exposures and additional two-step top side exposures. The width and depth of the SU-8 microchannel are 100 μm. Slanted grooves of 50 μm in width and 30 μm in depth were patterned on the top and the side walls of the microchannel. Their orientation angle was 63.5° with the microchannel axis. It was demonstrated that the microchannel with slanted grooves on three walls achieved short pitch spiral flow compared to the microchannel with slanted grooves on one wall. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

    KW - 3-D SU-8 molds

    KW - Backside exposure

    KW - Chaotic mixing

    KW - Efficient spiral flow

    UR - http://www.scopus.com/inward/record.url?scp=17044402214&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=17044402214&partnerID=8YFLogxK

    U2 - 10.1016/j.sna.2004.08.033

    DO - 10.1016/j.sna.2004.08.033

    M3 - Article

    AN - SCOPUS:17044402214

    VL - 119

    SP - 365

    EP - 371

    JO - Sensors and Actuators, A: Physical

    JF - Sensors and Actuators, A: Physical

    SN - 0924-4247

    IS - 2

    ER -