TY - JOUR
T1 - Performance demonstration of cavity-free planar multi-stage bileg and unileg silicon-nanowire thermoelectric generators
AU - Mahfuz, Md Mehdee Hasan
AU - Tomita, Motohiro
AU - Katayama, Kazuaki
AU - Kashizaki, Tsubasa
AU - Abe, Katsuki
AU - Hoshina, Takumi
AU - Matsuki, Takeo
AU - Watanabe, Takanobu
N1 - Funding Information:
This work was supported by the JST-CREST (JPMJCR15Q7, JPMJCR19Q5), JST SPRING (JPMJSP2128), by NIMS Nanofabrication Platform, and by AIST-SCR. We are grateful to Mr. Kawaguchi in Hamamatsu Photonics K.K. for offering stealth dicing.
Publisher Copyright:
© 2022 The Japan Society of Applied Physics.
PY - 2022/5
Y1 - 2022/5
N2 - The thermoelectric (TE) generator is expected to play an important role in the operation of tiny-watt capable wireless power supply devices, by converting waste heat energy into electrical energy. This work demonstrates planar cavity-free multi-stage n-type unileg-and bileg Si-nanowire (Si-NW) TE generators. The result shows that the output power of the multi-stage bileg-TE generator increases linearly with increasing the stage number, whereas the rate of increase of the multi-stage unileg-TE generator power output tends to decrease as the stage number increases. Although the power of the multi-stage bileg-TE generator fabricated in this work was smaller than that of the multi-stage unileg-TE generator, due to the large internal resistance of p-type elements, the improved linearity of the bileg-TE generator compared to the unileg-TE generator indicates the potential advantage of the multi-stage bileg-TE generator for large-scale integration.
AB - The thermoelectric (TE) generator is expected to play an important role in the operation of tiny-watt capable wireless power supply devices, by converting waste heat energy into electrical energy. This work demonstrates planar cavity-free multi-stage n-type unileg-and bileg Si-nanowire (Si-NW) TE generators. The result shows that the output power of the multi-stage bileg-TE generator increases linearly with increasing the stage number, whereas the rate of increase of the multi-stage unileg-TE generator power output tends to decrease as the stage number increases. Although the power of the multi-stage bileg-TE generator fabricated in this work was smaller than that of the multi-stage unileg-TE generator, due to the large internal resistance of p-type elements, the improved linearity of the bileg-TE generator compared to the unileg-TE generator indicates the potential advantage of the multi-stage bileg-TE generator for large-scale integration.
KW - multi-stage device
KW - peltier cooler
KW - seebeck coefficient
KW - semiconductor
KW - silicon-nanowire
KW - thermoelectric generator
KW - unileg-and bileg-thermoelectric generator
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U2 - 10.35848/1347-4065/ac4619
DO - 10.35848/1347-4065/ac4619
M3 - Article
AN - SCOPUS:85126112969
SN - 0021-4922
VL - 61
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - SC
M1 - SC1062
ER -