Performance evaluation of MOSFETs with discrete dopant distribution by one-by-one doping method

T. Shinada*, M. Hori, Y. Ono, K. Taira, A. Komatsubara, T. Tanii, T. Endoh, I. Ohdomari

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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