Peristaltic micropump fabricated by depositing parylene directly on liquid

Satoshi Komatsu, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2007-2010
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 11
Externally publishedYes
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

Keywords

  • Microfluidic system
  • Parylene
  • Peristaltic pump

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Komatsu, S., Binh-Khiem, N., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Peristaltic micropump fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2007-2010). [5285656] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285656