Photocatalytic Property and Deep Levels of Nb-doped Anatase TiO2 Film Grown by Metalorganic Chemical Vapor Depostion

Takahira Miyagi*, Masayuki Kamei, Isao Sakaguchi, Takefumi Mitsuhashi, Atsushi Yamazaki

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)


A Nb-doped anatase TiO2 (Mb: 5 at%) film was grown on a SrTiO3(001) substrate by metalorganic chemical vapor deposition. Deep level transient spectroscopy analysis revealed that this film possessed two kinds of deep levels due to the Nb ions, which were found to exist at 0.32 eV and 0.67 eV below the bottom of the conduction band. The photocatalytic activity of this film was low compared with that of the undoped anatase film, suggesting that the deep levels acted as recombination centers of photoexcited electron-hole pairs.

Original languageEnglish
Pages (from-to)775-776
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number2
Publication statusPublished - 2004 Feb


  • Anatase
  • DLTS
  • Deep level
  • Nb doping
  • Photocatalysis
  • Titanium dioxide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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