Photoluminescence from thermally oxidized hydrogenated amorphous silicon nanoball films fabricated by double-tubed-coaxial-line-type microwave plasma chemical vapor deposition system

Isamu Kato*, Takayuki Matsumoto, O. P. Agnihotri

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Photoluminescence from thermally oxidized hydrogenated amorphous silicon nanoball films fabricated by double-tubed-coaxial-line-type microwave plasma chemical vapor deposition system'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy