Photoluminescence study of defects in ion-implanted thermal SiO2 films

Hiroyuki Nishikawa, Eiki Watanabe, Daisuke Ito, Makoto Takiyama, Akihito Ieki, Yoshimichi Ohki

    Research output: Contribution to journalArticle

    79 Citations (Scopus)

    Abstract

    Through the photoluminescence, (PL) measurements, III-D in B- and P- implanted thermal SiO2 has been studied. The 4.3 and 2.6 eV bands can be ascribed to the singlet-singlet and triplet singlet transitions, respectively, at the site of oxygen - deficient - type defects induced by the ion implantation. The present study has demonstrated that the PL decay profile of oxygen-deficient-type defects induced by ion implantation can be a useful probe for the local network structures of thin film SiO2.

    Original languageEnglish
    Pages (from-to)842-846
    Number of pages5
    JournalJournal of Applied Physics
    Volume78
    Issue number2
    DOIs
    Publication statusPublished - 1995 Jan 1

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    ion implantation
    photoluminescence
    defects
    oxygen
    ions
    probes
    decay
    thin films
    profiles

    ASJC Scopus subject areas

    • Physics and Astronomy(all)
    • Physics and Astronomy (miscellaneous)

    Cite this

    Photoluminescence study of defects in ion-implanted thermal SiO2 films. / Nishikawa, Hiroyuki; Watanabe, Eiki; Ito, Daisuke; Takiyama, Makoto; Ieki, Akihito; Ohki, Yoshimichi.

    In: Journal of Applied Physics, Vol. 78, No. 2, 01.01.1995, p. 842-846.

    Research output: Contribution to journalArticle

    Nishikawa, H, Watanabe, E, Ito, D, Takiyama, M, Ieki, A & Ohki, Y 1995, 'Photoluminescence study of defects in ion-implanted thermal SiO2 films', Journal of Applied Physics, vol. 78, no. 2, pp. 842-846. https://doi.org/10.1063/1.360274
    Nishikawa, Hiroyuki ; Watanabe, Eiki ; Ito, Daisuke ; Takiyama, Makoto ; Ieki, Akihito ; Ohki, Yoshimichi. / Photoluminescence study of defects in ion-implanted thermal SiO2 films. In: Journal of Applied Physics. 1995 ; Vol. 78, No. 2. pp. 842-846.
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    AU - Ieki, Akihito

    AU - Ohki, Yoshimichi

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