Photoluminescence study of defects in ion-implanted thermal SiO2 films

Hiroyuki Nishikawa*, Eiki Watanabe, Daisuke Ito, Makoto Takiyama, Akihito Ieki, Yoshimichi Ohki

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

79 Citations (Scopus)

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Physics & Astronomy