Photoluminescence study on point defects in buried SiO2 film formed by implantation of oxygen

Kwang Soo Seol*, Akihito Ieki, Yoshimichi Ohki, Hiroyuki Nishikawa, Masaharu Tachimori

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)

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Physics & Astronomy