Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation

S. Matsui, Y. Takei, A. Matsumoto, K. Akahane, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    We studied the photonic integrated device of highly-stacked quantum dot (QD) on InP(311)B substrates using quantum dot intermixing (QDI) technique. A photoluminescence (PL) spectral blue-shift by about 190 nm was observed for the QDI process with B+ implantation and rapid thermal annealing (RTA) at 620°C. A QD laser integrated with two micro-ring-resonators (MRRs) was successfully fabricated with the QDI technique to show a large output of >20mW and a wavelength selective characteristic associated with MRRs.

    Original languageEnglish
    Title of host publication2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    ISBN (Electronic)9781509019649
    DOIs
    Publication statusPublished - 2016 Aug 1
    Event2016 Compound Semiconductor Week, CSW 2016 - Toyama, Japan
    Duration: 2016 Jun 262016 Jun 30

    Other

    Other2016 Compound Semiconductor Week, CSW 2016
    CountryJapan
    CityToyama
    Period16/6/2616/6/30

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    Keywords

    • integrated optics devices
    • intermixng
    • micro-ring-resonator
    • qauntum dot
    • semiconductor laser

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Electronic, Optical and Magnetic Materials

    Cite this

    Matsui, S., Takei, Y., Matsumoto, A., Akahane, K., Matsushima, Y., Ishikawa, H., & Utaka, K. (2016). Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation. In 2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016 [7528583] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICIPRM.2016.7528583