Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation

S. Matsui, Y. Takei, A. Matsumoto, K. Akahane, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We studied the photonic integrated device of highly-stacked quantum dot (QD) on InP(311)B substrates using quantum dot intermixing (QDI) technique. A photoluminescence (PL) spectral blue-shift by about 190 nm was observed for the QDI process with B+ implantation and rapid thermal annealing (RTA) at 620°C. A QD laser integrated with two micro-ring-resonators (MRRs) was successfully fabricated with the QDI technique to show a large output of >20mW and a wavelength selective characteristic associated with MRRs.

Original languageEnglish
Title of host publication2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509019649
DOIs
Publication statusPublished - 2016 Aug 1
Event2016 Compound Semiconductor Week, CSW 2016 - Toyama, Japan
Duration: 2016 Jun 262016 Jun 30

Other

Other2016 Compound Semiconductor Week, CSW 2016
CountryJapan
CityToyama
Period16/6/2616/6/30

Fingerprint

Ion implantation
Photonics
Semiconductor quantum dots
Resonators
Quantum dot lasers
Rapid thermal annealing
Photoluminescence
Wavelength
Substrates

Keywords

  • integrated optics devices
  • intermixng
  • micro-ring-resonator
  • qauntum dot
  • semiconductor laser

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Matsui, S., Takei, Y., Matsumoto, A., Akahane, K., Matsushima, Y., Ishikawa, H., & Utaka, K. (2016). Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation. In 2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016 [7528583] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICIPRM.2016.7528583

Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation. / Matsui, S.; Takei, Y.; Matsumoto, A.; Akahane, K.; Matsushima, Yuichi; Ishikawa, Hiroshi; Utaka, Katsuyuki.

2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016. Institute of Electrical and Electronics Engineers Inc., 2016. 7528583.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Matsui, S, Takei, Y, Matsumoto, A, Akahane, K, Matsushima, Y, Ishikawa, H & Utaka, K 2016, Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation. in 2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016., 7528583, Institute of Electrical and Electronics Engineers Inc., 2016 Compound Semiconductor Week, CSW 2016, Toyama, Japan, 16/6/26. https://doi.org/10.1109/ICIPRM.2016.7528583
Matsui S, Takei Y, Matsumoto A, Akahane K, Matsushima Y, Ishikawa H et al. Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation. In 2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016. Institute of Electrical and Electronics Engineers Inc. 2016. 7528583 https://doi.org/10.1109/ICIPRM.2016.7528583
Matsui, S. ; Takei, Y. ; Matsumoto, A. ; Akahane, K. ; Matsushima, Yuichi ; Ishikawa, Hiroshi ; Utaka, Katsuyuki. / Photonic integrated device of highly-stacked quantum dot using quantum dot intermixing by ion implantation. 2016 Compound Semiconductor Week, CSW 2016 - Includes 28th International Conference on Indium Phosphide and Related Materials, IPRM and 43rd International Symposium on Compound Semiconductors, ISCS 2016. Institute of Electrical and Electronics Engineers Inc., 2016.
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