Physical and chemical analytical instruments for failure analyses in G-bit devices

Yasuhiro Mitsui, Fumiko Yano, Yoshitaka Nakamura, Koji Kimoto, Tsuyoshi Hasegawa, Shigeharu Kimura, Kyoichiro Asayama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

The current status and future trend of analytical instruments are discussed. Analytical instruments for failure analyses in sub-1/4 micron dimensions or less, require high spatial resolution and sensitivity at atomic levels. Using new analytical instruments, such as the Nano-prober for electrical characteristics inspection in actual circuits, TEM-EELS for chemical bond analysis of nanometer area and GDS for precise composition analysis, it was found that a SiO2 or TiOx film formed by water from titanic acid (TiOxH2O) produced with titan, water and chlorine, was a cause of high resistivity for a contact (CVD-W/CVD-TiN/Ti/Si) in sub-1/4 micron devices.

Original languageEnglish
Title of host publicationTechnical Digest - International Electron Devices Meeting
Editors Anon
PublisherIEEE
Pages329-332
Number of pages4
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 1998 Dec 61998 Dec 9

Other

OtherProceedings of the 1998 IEEE International Electron Devices Meeting
CitySan Francisco, CA, USA
Period98/12/698/12/9

Fingerprint

Chemical vapor deposition
Electron energy loss spectroscopy
Chemical bonds
Chlorine
Water
Inspection
Transmission electron microscopy
Acids
Networks (circuits)
Chemical analysis

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Mitsui, Y., Yano, F., Nakamura, Y., Kimoto, K., Hasegawa, T., Kimura, S., & Asayama, K. (1998). Physical and chemical analytical instruments for failure analyses in G-bit devices. In Anon (Ed.), Technical Digest - International Electron Devices Meeting (pp. 329-332). IEEE.

Physical and chemical analytical instruments for failure analyses in G-bit devices. / Mitsui, Yasuhiro; Yano, Fumiko; Nakamura, Yoshitaka; Kimoto, Koji; Hasegawa, Tsuyoshi; Kimura, Shigeharu; Asayama, Kyoichiro.

Technical Digest - International Electron Devices Meeting. ed. / Anon. IEEE, 1998. p. 329-332.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mitsui, Y, Yano, F, Nakamura, Y, Kimoto, K, Hasegawa, T, Kimura, S & Asayama, K 1998, Physical and chemical analytical instruments for failure analyses in G-bit devices. in Anon (ed.), Technical Digest - International Electron Devices Meeting. IEEE, pp. 329-332, Proceedings of the 1998 IEEE International Electron Devices Meeting, San Francisco, CA, USA, 98/12/6.
Mitsui Y, Yano F, Nakamura Y, Kimoto K, Hasegawa T, Kimura S et al. Physical and chemical analytical instruments for failure analyses in G-bit devices. In Anon, editor, Technical Digest - International Electron Devices Meeting. IEEE. 1998. p. 329-332
Mitsui, Yasuhiro ; Yano, Fumiko ; Nakamura, Yoshitaka ; Kimoto, Koji ; Hasegawa, Tsuyoshi ; Kimura, Shigeharu ; Asayama, Kyoichiro. / Physical and chemical analytical instruments for failure analyses in G-bit devices. Technical Digest - International Electron Devices Meeting. editor / Anon. IEEE, 1998. pp. 329-332
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