Picosecond, kW thin disc laser technology for LPP and FEL EUV sources

A. Endo, M. Smrz, O. Novak, H. Turcicova, J. Muzik, J. Huynh, T. Mocek, Kazuyuki Sakaue, Masakazu Washio

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Picosecond, high average power laser is critical in the HVM EUV source technology. 100kHz, mJ, laser is realized by thin disc laser architecture for LPP, and > MHz laser is discussed for 10kW level EUV FEL.

Original languageEnglish
Title of host publicationCompact EUV and X-ray Light Sources, EUVXRAY 2016
PublisherOSA - The Optical Society
VolumePart F14-EUVXRAY 2016
ISBN (Print)9781943580095
Publication statusPublished - 2016 Mar 14
EventCompact EUV and X-ray Light Sources, EUVXRAY 2016 - Long Beach, United States
Duration: 2016 Mar 202016 Mar 22

Other

OtherCompact EUV and X-ray Light Sources, EUVXRAY 2016
CountryUnited States
CityLong Beach
Period16/3/2016/3/22

Fingerprint

Videodisks
Free electron lasers
Light sources
Lasers
High power lasers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Endo, A., Smrz, M., Novak, O., Turcicova, H., Muzik, J., Huynh, J., ... Washio, M. (2016). Picosecond, kW thin disc laser technology for LPP and FEL EUV sources. In Compact EUV and X-ray Light Sources, EUVXRAY 2016 (Vol. Part F14-EUVXRAY 2016). [ES4A.2] OSA - The Optical Society.

Picosecond, kW thin disc laser technology for LPP and FEL EUV sources. / Endo, A.; Smrz, M.; Novak, O.; Turcicova, H.; Muzik, J.; Huynh, J.; Mocek, T.; Sakaue, Kazuyuki; Washio, Masakazu.

Compact EUV and X-ray Light Sources, EUVXRAY 2016. Vol. Part F14-EUVXRAY 2016 OSA - The Optical Society, 2016. ES4A.2.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Endo, A, Smrz, M, Novak, O, Turcicova, H, Muzik, J, Huynh, J, Mocek, T, Sakaue, K & Washio, M 2016, Picosecond, kW thin disc laser technology for LPP and FEL EUV sources. in Compact EUV and X-ray Light Sources, EUVXRAY 2016. vol. Part F14-EUVXRAY 2016, ES4A.2, OSA - The Optical Society, Compact EUV and X-ray Light Sources, EUVXRAY 2016, Long Beach, United States, 16/3/20.
Endo A, Smrz M, Novak O, Turcicova H, Muzik J, Huynh J et al. Picosecond, kW thin disc laser technology for LPP and FEL EUV sources. In Compact EUV and X-ray Light Sources, EUVXRAY 2016. Vol. Part F14-EUVXRAY 2016. OSA - The Optical Society. 2016. ES4A.2
Endo, A. ; Smrz, M. ; Novak, O. ; Turcicova, H. ; Muzik, J. ; Huynh, J. ; Mocek, T. ; Sakaue, Kazuyuki ; Washio, Masakazu. / Picosecond, kW thin disc laser technology for LPP and FEL EUV sources. Compact EUV and X-ray Light Sources, EUVXRAY 2016. Vol. Part F14-EUVXRAY 2016 OSA - The Optical Society, 2016.
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