Picosecond, kW thin disc laser technology for LPP and FEL EUV sources

A. Endo; M. Smrz; O. Novak; H. Turcicova; J. Muzik; J. Huynh; T. Mocek; K. Sakaue; M. Washio

doi:10.1364/euvxray.2016.es4a.2

Picosecond, kW thin disc laser technology for LPP and FEL EUV sources

A. Endo, M. Smrz, O. Novak, H. Turcicova, J. Muzik, J. Huynh, T. Mocek, K. Sakaue, M. Washio

School of Advanced Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Picosecond, high average power laser is critical in the HVM EUV source technology. 100kHz, mJ, laser is realized by thin disc laser architecture for LPP, and > MHz laser is discussed for 10kW level EUV FEL.

Original language	English
Title of host publication	Compact EUV and X-ray Light Sources, EUVXRAY 2016
Publisher	OSA - The Optical Society
ISBN (Print)	9781943580095
DOIs	https://doi.org/10.1364/euvxray.2016.es4a.2
Publication status	Published - 2016 Mar 14
Event	Compact EUV and X-ray Light Sources, EUVXRAY 2016 - Long Beach, United States Duration: 2016 Mar 20 → 2016 Mar 22

Publication series

Name	Optics InfoBase Conference Papers

Other

Other	Compact EUV and X-ray Light Sources, EUVXRAY 2016
Country/Territory	United States
City	Long Beach
Period	16/3/20 → 16/3/22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/euvxray.2016.es4a.2

Cite this

Endo, A, Smrz, M, Novak, O, Turcicova, H, Muzik, J, Huynh, J, Mocek, T, Sakaue, K & Washio, M 2016, Picosecond, kW thin disc laser technology for LPP and FEL EUV sources. in Compact EUV and X-ray Light Sources, EUVXRAY 2016., ES4A.2, Optics InfoBase Conference Papers, OSA - The Optical Society, Compact EUV and X-ray Light Sources, EUVXRAY 2016, Long Beach, United States, 16/3/20. https://doi.org/10.1364/euvxray.2016.es4a.2

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title = "Picosecond, kW thin disc laser technology for LPP and FEL EUV sources",

abstract = "Picosecond, high average power laser is critical in the HVM EUV source technology. 100kHz, mJ, laser is realized by thin disc laser architecture for LPP, and > MHz laser is discussed for 10kW level EUV FEL.",

author = "A. Endo and M. Smrz and O. Novak and H. Turcicova and J. Muzik and J. Huynh and T. Mocek and K. Sakaue and M. Washio",

year = "2016",

month = mar,

day = "14",

doi = "10.1364/euvxray.2016.es4a.2",

language = "English",

isbn = "9781943580095",

series = "Optics InfoBase Conference Papers",

publisher = "OSA - The Optical Society",

booktitle = "Compact EUV and X-ray Light Sources, EUVXRAY 2016",

note = "Compact EUV and X-ray Light Sources, EUVXRAY 2016 ; Conference date: 20-03-2016 Through 22-03-2016",

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TY - GEN

T1 - Picosecond, kW thin disc laser technology for LPP and FEL EUV sources

AU - Endo, A.

AU - Smrz, M.

AU - Novak, O.

AU - Turcicova, H.

AU - Muzik, J.

AU - Huynh, J.

AU - Mocek, T.

AU - Sakaue, K.

AU - Washio, M.

PY - 2016/3/14

Y1 - 2016/3/14

N2 - Picosecond, high average power laser is critical in the HVM EUV source technology. 100kHz, mJ, laser is realized by thin disc laser architecture for LPP, and > MHz laser is discussed for 10kW level EUV FEL.

AB - Picosecond, high average power laser is critical in the HVM EUV source technology. 100kHz, mJ, laser is realized by thin disc laser architecture for LPP, and > MHz laser is discussed for 10kW level EUV FEL.

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U2 - 10.1364/euvxray.2016.es4a.2

DO - 10.1364/euvxray.2016.es4a.2

M3 - Conference contribution

AN - SCOPUS:85016468958

SN - 9781943580095

T3 - Optics InfoBase Conference Papers

BT - Compact EUV and X-ray Light Sources, EUVXRAY 2016

PB - OSA - The Optical Society

T2 - Compact EUV and X-ray Light Sources, EUVXRAY 2016

Y2 - 20 March 2016 through 22 March 2016

ER -

Picosecond, kW thin disc laser technology for LPP and FEL EUV sources

Abstract

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