Piezoelectric pseudo-static actuator for large displacement under AC voltage operation

Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A new driving mechanism of a microactuator is reported. The actuator is composed of folded suspensions and a mass. The driving mechanism is interesting because the actuator generates large static displacement when over all structure oscillates at a higher mode resonance. Since this phenomenon (pseudo-static displacement) was observed in the actuator made of various materials, it seems to be an effect common to this shape of actuator, and can be applied to design a small actuator which generates large static displacement with low driving voltage. This paper deals with the typical structure of the actuator and mechanical characteristics of pseudo-static displacement.

Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages389-392
Number of pages4
Volume1
Publication statusPublished - 1995
Externally publishedYes
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: 1995 Jun 251995 Jun 29

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period95/6/2595/6/29

ASJC Scopus subject areas

  • Engineering(all)

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