Abstract
A new driving mechanism of a microactuator is reported. The actuator is composed of folded suspensions and a mass. The driving mechanism is interesting because the actuator generates large static displacement when over all structure oscillates at a higher mode resonance. Since this phenomenon (pseudo-static displacement) was observed in the actuator made of various materials, it seems to be an effect common to this shape of actuator, and can be applied to design a small actuator which generates large static displacement with low driving voltage. This paper deals with the typical structure of the actuator and mechanical characteristics of pseudo-static displacement.
| Original language | English |
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| Title of host publication | International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | IEEE |
| Pages | 389-392 |
| Number of pages | 4 |
| Volume | 1 |
| Publication status | Published - 1995 |
| Externally published | Yes |
| Event | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29 |
Other
| Other | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) |
|---|---|
| City | Stockholm, Sweden |
| Period | 95/6/25 → 95/6/29 |
ASJC Scopus subject areas
- Engineering(all)