Abstract
We report the new type of a monolithic quartz actuator which is fabricated by anisotropic etching and operated through piezoelectric effect at resonant frequency. The quartz actuators with large displacement have no been developed because quartz has small piezoelectric constants compared to other materials such as PZT. However, we proved that a smart mechanism enabled us to have a large displacement up to 200 microns with a millimeter size suspended actuator using the piezoelectricity of quartz. As examples, we fabricated bellows type actuators and optical choppers, and measured their mechanical characteristics. We also showed that the bellows type actuator could displace a small object statically by hitting it repeatedly. This woodpecker motion can be applied to move the small optical component such as a mirror and prism to switch the path of light.
| Original language | English |
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| Title of host publication | IEEE Micro Electro Mechanical Systems |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | Publ by IEEE |
| Pages | 133-138 |
| Number of pages | 6 |
| ISBN (Print) | 0780309588 |
| Publication status | Published - 1993 |
| Externally published | Yes |
| Event | Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA Duration: 1993 Feb 7 → 1993 Feb 10 |
Other
| Other | Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS |
|---|---|
| City | Fort Lauderdale, FL, USA |
| Period | 93/2/7 → 93/2/10 |
ASJC Scopus subject areas
- Engineering(all)