Piezoelectrically operated optical chopper by quartz micromachining

Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda

    Research output: Contribution to journalArticle

    26 Citations (Scopus)

    Abstract

    The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm × 7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 μm thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10approx.50 μm wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 μm (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account. We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper. [123]

    Original languageEnglish
    Pages (from-to)3-9
    Number of pages7
    JournalJournal of Microelectromechanical Systems
    Volume4
    Issue number1
    DOIs
    Publication statusPublished - 1995 Mar

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering

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