Pinhole-free pyrex glass etching using HF-H 2SO 4 mixed acid and its applications for a PDMS microflow system

Takahiro Arakawa; Yukiko Sato; Taro Ueno; Takashi Funatsu; Shuichi Shoji

doi:10.1109/SENSOR.2005.1497365

Pinhole-free pyrex glass etching using HF-H ₂SO ₄ mixed acid and its applications for a PDMS microflow system

Takahiro Arakawa, Yukiko Sato, Taro Ueno, Takashi Funatsu, Shuichi Shoji

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Useful Pyrex glass etching method using HF and H ₂SO ₄ mixed acid was studied. To realize the etching behaviors of constant etch rate, high masks durability, small under cut and pinhole free, optimum composition of HF-H ₂SO ₄ system was found out. Pinhole-free etching, constant etching rate of 0.5 μm/min and smooth surface of less than 4.6nm was obtained at 0.8vol% HF and 32vol% H ₂SO ₄. This system realized high durability of the etching mask of Si, Cr/Au and even photoresists. This method is useful not only to fabricate Pyrex glass microchannels but also to make PDMS molds. We fabricated a prototype of the pneumatic actuated microvalve system for the single molecular imaging under Total Internal Reflection Fluorescence Microscopy (TIRFM). The leakage free valve actions are confirmed and the switching time of Open-Close and Close-Open modes are 100msec and 120msec respectively.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1489-1492
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1497365
Publication status	Published - 2005 Nov 9
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

Microflow system
Mixed acid wetetching
PDMS microvalve
TIRFM

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/SENSOR.2005.1497365

Cite this

Arakawa, T., Sato, Y., Ueno, T., Funatsu, T., & Shoji, S. (2005). Pinhole-free pyrex glass etching using HF-H ₂SO ₄ mixed acid and its applications for a PDMS microflow system. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1489-1492). [3E4.48] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497365

Pinhole-free pyrex glass etching using HF-H ₂SO ₄ mixed acid and its applications for a PDMS microflow system. / Arakawa, Takahiro; Sato, Yukiko; Ueno, Taro et al.

TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1489-1492 3E4.48 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Arakawa, T, Sato, Y, Ueno, T, Funatsu, T & Shoji, S 2005, Pinhole-free pyrex glass etching using HF-H ₂SO ₄ mixed acid and its applications for a PDMS microflow system. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3E4.48, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1489-1492, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497365

Arakawa T, Sato Y, Ueno T, Funatsu T, Shoji S. Pinhole-free pyrex glass etching using HF-H ₂SO ₄ mixed acid and its applications for a PDMS microflow system. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1489-1492. 3E4.48. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1497365

Arakawa, Takahiro ; Sato, Yukiko ; Ueno, Taro et al. / Pinhole-free pyrex glass etching using HF-H ₂SO ₄ mixed acid and its applications for a PDMS microflow system. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1489-1492 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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