Plasma-polymerized coatings for bio-MEMS applications

Salim Bouaidat*, Bjorn Winther Jensen, Søren Flygenring Christensen, Jacques Jonsmann

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)


Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 μm and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip.

Original languageEnglish
Pages (from-to)390-394
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number1-3
Publication statusPublished - 2004 Feb 1
Externally publishedYes


  • Bioactive surfaces
  • Cell adhesive
  • Cell non-adhesive
  • Lift-off
  • Micropatterning
  • Plasma-polymerized

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation


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