Plasma-polymerized coatings for bio-MEMS applications

Salim Bouaidat, Bjorn Winther Jensen, Søren Flygenring Christensen, Jacques Jonsmann

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 μm and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip.

Original languageEnglish
Pages (from-to)390-394
Number of pages5
JournalSensors and Actuators, A: Physical
Volume110
Issue number1-3
DOIs
Publication statusPublished - 2004 Feb 1
Externally publishedYes

Fingerprint

microelectromechanical systems
MEMS
Plasmas
coatings
Coatings
xylene
Xylene
adhesives
Adhesives
cells
Plasma polymerization
Photolithography
Silicon
versatility
photolithography
Microfluidics
Escherichia coli
polymerization
alignment
Glass

Keywords

  • Bioactive surfaces
  • Cell adhesive
  • Cell non-adhesive
  • Lift-off
  • Micropatterning
  • Plasma-polymerized

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Plasma-polymerized coatings for bio-MEMS applications. / Bouaidat, Salim; Winther Jensen, Bjorn; Christensen, Søren Flygenring; Jonsmann, Jacques.

In: Sensors and Actuators, A: Physical, Vol. 110, No. 1-3, 01.02.2004, p. 390-394.

Research output: Contribution to journalArticle

Bouaidat, Salim ; Winther Jensen, Bjorn ; Christensen, Søren Flygenring ; Jonsmann, Jacques. / Plasma-polymerized coatings for bio-MEMS applications. In: Sensors and Actuators, A: Physical. 2004 ; Vol. 110, No. 1-3. pp. 390-394.
@article{e069d65c3ab248fc9c1d88536e830b1e,
title = "Plasma-polymerized coatings for bio-MEMS applications",
abstract = "Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 μm and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip.",
keywords = "Bioactive surfaces, Cell adhesive, Cell non-adhesive, Lift-off, Micropatterning, Plasma-polymerized",
author = "Salim Bouaidat and {Winther Jensen}, Bjorn and Christensen, {S{\o}ren Flygenring} and Jacques Jonsmann",
year = "2004",
month = "2",
day = "1",
doi = "10.1016/j.sna.2003.10.032",
language = "English",
volume = "110",
pages = "390--394",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Plasma-polymerized coatings for bio-MEMS applications

AU - Bouaidat, Salim

AU - Winther Jensen, Bjorn

AU - Christensen, Søren Flygenring

AU - Jonsmann, Jacques

PY - 2004/2/1

Y1 - 2004/2/1

N2 - Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 μm and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip.

AB - Coatings that provide either hydrophobic, hydrophilic, cell adhesive or cell non-adhesive functionalities have been deposited using three-phase low energy plasma-polymerization. The cell adhesive/non-adhesive coatings were tested using E. coli k-12. The four plasma-polymerized coatings are: para-xylene (PX), 1-vinyl-2-pyrrolidinone (VP), polyvinyldifluoride (PVDF) and phosphorous glass (SiPOC), respectively. In addition, micropatterning of PX and VP has been performed on the same silicon substrate. Feature sizes down to 2 μm and precise alignment were obtained using lift-off and cleanroom photolithography techniques. The patterning process used did not influence the wetability of the coatings. The simplicity of the lift-off technique and the sturdiness and versatility of the plasma-polymerized coatings, make this ideal for MEMS, bio-MEMS and microfluidic applications, where patterned surfaces with different functionalities are required on for instance the same microchip.

KW - Bioactive surfaces

KW - Cell adhesive

KW - Cell non-adhesive

KW - Lift-off

KW - Micropatterning

KW - Plasma-polymerized

UR - http://www.scopus.com/inward/record.url?scp=1642525633&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1642525633&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2003.10.032

DO - 10.1016/j.sna.2003.10.032

M3 - Article

VL - 110

SP - 390

EP - 394

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 1-3

ER -