PLZT electro-optic modulators on Si substrates using aerosol deposition for on-chip optical interconnections

T. Shimizu, M. Nakada, H. Tsuda, J. Akedo, K. Nishi, Keishi Ohashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We developed lanthanum modified lead zirconate titanate, (Pb,La)(Zr,Ti)0 3 (PLZT), electro-optic modulators on a Si substrate using aerosol deposition (AD) for on-chip optical interconnections. The modulator was designed as a 250x300 μm ring resonator with a 7 dB extinction ratio at 3 V p-p. We observed the optical transmission of a PZT waveguide and the transmission loss was as small as 4 dB/mm.

Original languageEnglish
Title of host publicationIEEE International Conference on Group IV Photonics GFP
Pages210-212
Number of pages3
Publication statusPublished - 2007
Externally publishedYes
Event2007 4th International Conference on Group IV Photonics, GFP 2007 -
Duration: 2007 Sep 192007 Sep 21

Other

Other2007 4th International Conference on Group IV Photonics, GFP 2007
Period07/9/1907/9/21

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

Cite this

Shimizu, T., Nakada, M., Tsuda, H., Akedo, J., Nishi, K., & Ohashi, K. (2007). PLZT electro-optic modulators on Si substrates using aerosol deposition for on-chip optical interconnections. In IEEE International Conference on Group IV Photonics GFP (pp. 210-212). [4347718]