PLZT electro-optic modulators on Si substrates using aerosol deposition for on-chip optical interconnections

T. Shimizu, M. Nakada, H. Tsuda, J. Akedo, K. Nishi, K. Ohashi

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

We developed lanthanum modified lead zirconate titanate, (Pb,La)(Zr,Ti)03 (PLZT), electro-optic modulators on a Si substrate using aerosol deposition (AD) for on-chip optical interconnections. The modulator was designed as a 250x300 μm ring resonator with a 7 dB extinction ratio at 3 Vp-p. We observed the optical transmission of a PZT waveguide and the transmission loss was as small as 4 dB/mm.

Original languageEnglish
Article number4347718
Pages (from-to)210-212
Number of pages3
JournalIEEE International Conference on Group IV Photonics GFP
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event2007 4th International Conference on Group IV Photonics, GFP 2007 -
Duration: 2007 Sep 192007 Sep 21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

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