POINT ION SOURCES BASED ON FIELD IONIZATION.

Masanori Komuro, Hiroshi Hiroshima, Hajime Shimizu, Masatoshi Ono, Shingo Ichimura, Hiroshi Murakami, Mieko Sato

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Point ion sources utilizing the ionization of atoms and molecules in high electric fields have been studied at several laboratories in the U. S. A. , European countries and Japan for a drastic improvement in the performance of apparatuses that use finely focused ion beams. It is the main objective of this report to investigate the present status of studies on the basic phenomena and applications of the field point ion sources. In Chapter 1, the technology for application of high-brightness ion sources is surveyed. Chapter 2 provides a scientific foundation for the gas-phase field ionization source. Chapter 3 discusses the present technology of ion optics for ion micro-beams of high brightness. Chapter 4 discussed improvements of gas-phase field ion sources. Refs.

Original languageEnglish
Title of host publicationDenshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory
Edition209
Publication statusPublished - 1984 Jan 1
Externally publishedYes

Fingerprint

Ion sources
Ionization
Luminance
Focused ion beams
Ions
Gases
Optics
Electric fields
Atoms
Molecules

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Komuro, M., Hiroshima, H., Shimizu, H., Ono, M., Ichimura, S., Murakami, H., & Sato, M. (1984). POINT ION SOURCES BASED ON FIELD IONIZATION. In Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory (209 ed.)

POINT ION SOURCES BASED ON FIELD IONIZATION. / Komuro, Masanori; Hiroshima, Hiroshi; Shimizu, Hajime; Ono, Masatoshi; Ichimura, Shingo; Murakami, Hiroshi; Sato, Mieko.

Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory. 209. ed. 1984.

Research output: Chapter in Book/Report/Conference proceedingChapter

Komuro, M, Hiroshima, H, Shimizu, H, Ono, M, Ichimura, S, Murakami, H & Sato, M 1984, POINT ION SOURCES BASED ON FIELD IONIZATION. in Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory. 209 edn.
Komuro M, Hiroshima H, Shimizu H, Ono M, Ichimura S, Murakami H et al. POINT ION SOURCES BASED ON FIELD IONIZATION. In Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory. 209 ed. 1984
Komuro, Masanori ; Hiroshima, Hiroshi ; Shimizu, Hajime ; Ono, Masatoshi ; Ichimura, Shingo ; Murakami, Hiroshi ; Sato, Mieko. / POINT ION SOURCES BASED ON FIELD IONIZATION. Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory. 209. ed. 1984.
@inbook{55f2ef6d1e654466aed526a1a77d3341,
title = "POINT ION SOURCES BASED ON FIELD IONIZATION.",
abstract = "Point ion sources utilizing the ionization of atoms and molecules in high electric fields have been studied at several laboratories in the U. S. A. , European countries and Japan for a drastic improvement in the performance of apparatuses that use finely focused ion beams. It is the main objective of this report to investigate the present status of studies on the basic phenomena and applications of the field point ion sources. In Chapter 1, the technology for application of high-brightness ion sources is surveyed. Chapter 2 provides a scientific foundation for the gas-phase field ionization source. Chapter 3 discusses the present technology of ion optics for ion micro-beams of high brightness. Chapter 4 discussed improvements of gas-phase field ion sources. Refs.",
author = "Masanori Komuro and Hiroshi Hiroshima and Hajime Shimizu and Masatoshi Ono and Shingo Ichimura and Hiroshi Murakami and Mieko Sato",
year = "1984",
month = "1",
day = "1",
language = "English",
booktitle = "Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory",
edition = "209",

}

TY - CHAP

T1 - POINT ION SOURCES BASED ON FIELD IONIZATION.

AU - Komuro, Masanori

AU - Hiroshima, Hiroshi

AU - Shimizu, Hajime

AU - Ono, Masatoshi

AU - Ichimura, Shingo

AU - Murakami, Hiroshi

AU - Sato, Mieko

PY - 1984/1/1

Y1 - 1984/1/1

N2 - Point ion sources utilizing the ionization of atoms and molecules in high electric fields have been studied at several laboratories in the U. S. A. , European countries and Japan for a drastic improvement in the performance of apparatuses that use finely focused ion beams. It is the main objective of this report to investigate the present status of studies on the basic phenomena and applications of the field point ion sources. In Chapter 1, the technology for application of high-brightness ion sources is surveyed. Chapter 2 provides a scientific foundation for the gas-phase field ionization source. Chapter 3 discusses the present technology of ion optics for ion micro-beams of high brightness. Chapter 4 discussed improvements of gas-phase field ion sources. Refs.

AB - Point ion sources utilizing the ionization of atoms and molecules in high electric fields have been studied at several laboratories in the U. S. A. , European countries and Japan for a drastic improvement in the performance of apparatuses that use finely focused ion beams. It is the main objective of this report to investigate the present status of studies on the basic phenomena and applications of the field point ion sources. In Chapter 1, the technology for application of high-brightness ion sources is surveyed. Chapter 2 provides a scientific foundation for the gas-phase field ionization source. Chapter 3 discusses the present technology of ion optics for ion micro-beams of high brightness. Chapter 4 discussed improvements of gas-phase field ion sources. Refs.

UR - http://www.scopus.com/inward/record.url?scp=0021139264&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0021139264&partnerID=8YFLogxK

M3 - Chapter

BT - Denshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory

ER -