Polarized Raman study for epitaxial PZT thick film with the mixture orientation of (100)/(001)

Mitsumasa Nakajima*, Takashi Fujisawa, Ken Nishida, Takashi Yamamoto, Minoru Osada, Hiroshi Naganuma, Soichiro Okamura, Hiroshi Funakubo

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

(100)/(001)-Oriented PZT thick films were grown on SrRuO3//(100) SrTiO3 and (100) MgO substrates by matel organic chemical vapor deposition (MOCVD) with different volume fraction of (001) orientation, and were compared with (001) single-oriented epitaxial PZT thick films grown on SrRuO3//LaNiO3//(100) CaF2 by polarized Raman spectroscopy. The spectra from (100)-oriented domain and (001)-oriented domain can be individually observed for the films with the mixture orientation of (100)/(001). Raman analysis revealed the different strain state of (100)-oriented and (001)-oriented domains. Moreover, the rotation dependence of A1(1TO) mode could be explained by the calculation using the volume fraction of (001)-oriented domains obtained from X-ray reciprocal space mapping analysis for the films with the mixture orientation of (100)/(001). These results suggest the local structure characterized by Raman spectroscopy almost agreed with the structure characterized by XRD analysis for the films with the mixture orientation of (100)/(001).

Original languageEnglish
Title of host publicationKey Engineering Materials
Pages99-102
Number of pages4
Volume421-422
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan - Tsukuba, Japan
Duration: 2008 Oct 222008 Oct 24

Publication series

NameKey Engineering Materials
Volume421-422
ISSN (Print)10139826

Other

Other6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan
Country/TerritoryJapan
CityTsukuba
Period08/10/2208/10/24

Keywords

  • Epitaxial PZT film
  • MOCVD
  • Raman spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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