Polymer-MEMS and Its Applications

    Research output: Contribution to journalArticle

    4 Citations (Scopus)

    Abstract

    Fabrication methods of polymer microstruetures for (µTAS, Lab-on-a-chip and BioMEMS developed so far are reviewed. Conventional plastic molds of hot embossing, injection molding and casting have been applied for fabrications of the microstructures with improvements of precise temperature control etc. New silicone like material, PDMS have been widely used in (µTAS. Some UV photolithography methods have also been developed to realize 3D microstructures. Surface micromachining technologies using polymer as the structure and positive photoresist as the sacrificial layer are another potential fabrication methods in µTAS.

    Original languageEnglish
    Pages (from-to)349-353
    Number of pages5
    JournalIEEJ Transactions on Sensors and Micromachines
    Volume124
    Issue number10
    DOIs
    Publication statusPublished - 2006

    Keywords

    • 3D microstructure
    • Molding
    • PDMS
    • Photosensitive Polymer
    • Plastic
    • Polymer

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

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