Polysilicon thin-film transistors with channel length and width comparable to or smaller than the grain size of the thin film

Noriyoshi Yamauchi, Jean Jacques J Hajjar, Rafael Reif

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Abstract

Poly-Si thin-film transistors (TFTs) with channel dimensions (width W, and length L) comparable to or smaller than the grain size of the poly-Si film were fabricated and characterized. The grain size of the poly-Si film was enhanced by Si ion implantation followed by a low-temperature anneal and was typically 1 to 3 μm in diameter. A remarkable improvement was observed in the device characteristics as the channel dimensions decreased to W = L = 2 μm. On the other hand, TFTs with submicrometer channel dimensions were characterized by an extremely abrupt switching in their ID versus VGS characteristics. The improvement was attributed to a reduction in the effect of the grain boundaries and to the effect of the device's floating body.

Original languageEnglish
Pages (from-to)55-60
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume38
Issue number1
DOIs
Publication statusPublished - 1991 Jan
Externally publishedYes

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

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