Position-Controlled Functionalization of Vacancies in Silicon by Single-Ion Implanted Germanium Atoms

Simona Achilli*, Nguyen H. Le, Guido Fratesi, Nicola Manini, Giovanni Onida, Marco Turchetti, Giorgio Ferrari, Takahiro Shinada, Takashi Tanii, Enrico Prati

*Corresponding author for this work

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