Positive-negative dual-tone sensitivities of ZEP resist

Tomoko Gowa Oyama, Hirotaka Nakamura, Akihiro Oshima, Masakazu Washio, Seiichi Tagawa

    Research output: Contribution to journalArticle

    3 Citations (Scopus)

    Abstract

    A chlorinated resist named ZEP changes from positive- to negative-tone with a high dose of electron beam irradiation. The sensitivities to a 100-kV electron beam as a dual positive- and negative-tone resist are evaluated with various developers. Although the positive-tone sensitivity varies with different developers owing to different solvation strengths, the threshold dose for the positive-negative (P-N) inversion is independent of the developer. According to an analysis using X-ray photoelectron spectroscopy and NMR spectroscopy, the amount of chlorine atoms and terminal double bonds generated by chain scission determines the scission/crosslinking probabilities, i.e., the threshold of the P-N inversion.

    Original languageEnglish
    Article number036501
    JournalApplied Physics Express
    Volume7
    Issue number3
    DOIs
    Publication statusPublished - 2014

    Fingerprint

    photographic developers
    Electron beams
    cleavage
    sensitivity
    Solvation
    Crosslinking
    electron beams
    inversions
    Chlorine
    Nuclear magnetic resonance spectroscopy
    Dosimetry
    dosage
    thresholds
    X ray photoelectron spectroscopy
    Irradiation
    crosslinking
    Atoms
    chlorine
    solvation
    photoelectron spectroscopy

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

    Cite this

    Positive-negative dual-tone sensitivities of ZEP resist. / Oyama, Tomoko Gowa; Nakamura, Hirotaka; Oshima, Akihiro; Washio, Masakazu; Tagawa, Seiichi.

    In: Applied Physics Express, Vol. 7, No. 3, 036501, 2014.

    Research output: Contribution to journalArticle

    Oyama, Tomoko Gowa ; Nakamura, Hirotaka ; Oshima, Akihiro ; Washio, Masakazu ; Tagawa, Seiichi. / Positive-negative dual-tone sensitivities of ZEP resist. In: Applied Physics Express. 2014 ; Vol. 7, No. 3.
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