Possibilities of electron beam nano-meter-scale fabrication of Si(111) using alkyl monolayers

Taro Yamada, Nao Takano, Keiko Yamada, Shuhei Yoshitomi, Tomoyuki Inoue, Tetsuya Osaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy