Post-discharge study of laser-triggered vacuum discharge for highly repetitive powerful EUV source

P. Lu, S. Kitajima, S. Lim, S. Katsuki, H. Akiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Extreme ultraviolet (EUV) source remains a key issue for industrial application of EUV lithography. Currently, laser-triggered discharge (LTD) tin plasma is the most promising discharge produced plasma EUV source scheme. High frequency discharge of up to tens of kHz is required to achieve sufficient average radiation power. However, the choice of discharge frequency is restricted by the recovery time of the remnant plasma in the post discharge stage. Although much work has been performed to investigate discharge plasma dynamics and its corresponding EUV radiation process during main discharge, study regarding post-discharge stage of LTD tin plasma EUV source is scant. In this paper, we present a post-discharge study of a laser-triggered vacuum discharge for high repetition rate EUV source. The insulation strength recovery curve of tin fuel residual between electrodes was measured by time lapse electrical breakdown voltage test. In addition, the two-laser triggered discharge system was built to model the high frequency operation of the laser-triggered discharge plasma EUV source. The intensity recovery process of EUV radiation with different discharge time intervals was measured. Time relation between two recovery processes of electrical insulation strength and EUV radiation has been discussed for the estimation of optimal frequency in our LTDPP EUV source.

Original languageEnglish
Title of host publication2013 19th IEEE Pulsed Power Conference, PPC 2013
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 19th IEEE Pulsed Power Conference, PPC 2013 - San Francisco, CA, United States
Duration: 2013 Jun 162013 Jun 21

Publication series

NameDigest of Technical Papers-IEEE International Pulsed Power Conference

Conference

Conference2013 19th IEEE Pulsed Power Conference, PPC 2013
CountryUnited States
CitySan Francisco, CA
Period13/6/1613/6/21

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Post-discharge study of laser-triggered vacuum discharge for highly repetitive powerful EUV source'. Together they form a unique fingerprint.

Cite this